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| Quantity: | |
TN
Plasma Source for Multi-arc ion coater
| Cavity | PBN(N2/H2)、Quartz(O2/H2) |
| Flange | ICF114(CF63) |
| Water cooling structure | Have |
| Maximum power | 600W |
| Occurrence frequency | 13.56MHz |
| Gas inlet flange | ICF34(CF16) |
Plasma Source for Multi-arc ion coater
| Cavity | PBN(N2/H2)、Quartz(O2/H2) |
| Flange | ICF114(CF63) |
| Water cooling structure | Have |
| Maximum power | 600W |
| Occurrence frequency | 13.56MHz |
| Gas inlet flange | ICF34(CF16) |