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Plasma Source for Multi-arc ion coater

Plasma Source for Multi-arc ion coater
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  • TN

Plasma Source for Multi-arc ion coater

CavityPBN(N2/H2)、Quartz(O2/H2)
FlangeICF114(CF63)
Water cooling structureHave
Maximum power600W
Occurrence frequency13.56MHz
Gas inlet flangeICF34(CF16)


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